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精密运动平台 LPM系列

Date:9/22/2018 6:39:20 PM　Hits:804

精密运动平台 LPM系列

  • 采用无铁芯直线电机BUM系列
  • 低速度波动小
  • 采用光栅尺或磁栅尺，分辨率可达0.1μm
  • 定位精度达5μm，重复定位精度可达1μm

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